Direct analysis of ultra-trace semiconductor gas by inductively coupled plasma mass spectrometry coupled with gas to particle conversion-gas exchange technique
- Journal Article
Journal / seriesAnalytica chimica acta
SubjectDirect analysis; Gas exchange; Gas to particle conversion; Inductively coupled plasma mass spectrometry; Particle size distribution; Semiconductor gas
Organisational unit03512 - Günther, Detlef
NotesReceived 13 March 2015, Revised 12 June 2015, Accepted 18 June 2015, Published online 7 August 2015.
MoreShow all metadata