Direct analysis of ultra-trace semiconductor gas by inductively coupled plasma mass spectrometry coupled with gas to particle conversion-gas exchange technique

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Author
Ohata, Masaki
Sakurai, Hiromu
Nishiguchi, Kohei
Utani, Keisuke
Günther, Detlef
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Date
2015-09
Type
    Journal Article
Publication status
published
External links
Journal / series
Analytica Chimica Acta
Volume
891
Pages / Article No.
73 - 78
Publisher
Elsevier
Subject
Direct analysis; Gas exchange; Gas to particle conversion; Inductively coupled plasma mass spectrometry; Particle size distribution; Semiconductor gas
Organisational unit
03512 - Günther, Detlef / Günther, Detlef  
Notes
Received 13 March 2015, Revised 12 June 2015, Accepted 18 June 2015, Published online 7 August 2015.
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Citations
Cited 10 times in Scopus
ETH Bibliography
yes
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