Copper thin films by ion beam assisted deposition: Strong texture, superior thermal stability and enhanced hardness

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Author
Ma, Huan
Zou, Yu
Sologubenko, Allacc
Spolenak, Ralph
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Date
2015-10
Type
    Journal Article
Publication status
published
External links
Journal / series
Acta Materialia
Volume
98
Pages / Article No.
17 - 28
Publisher
Elsevier
Subject
Thin film; Ion beam processing; Defects; Microstructure; Hardness
Organisational unit
03692 - Spolenak, Ralph / Spolenak, Ralph  
02891 - ScopeM / ScopeM  
Notes
Published online 11 July 2015.
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