Influence of air humidity on polymeric microresonators

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Author
Schmid, S.
Kuehne, Stéphane
Hierold, Christofer
Date
2009
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Journal of micromechanics and microengineering
Volume
19(6)
Pages
065018
Publisher
Institute of Physics
Notes
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