Influence of air humidity on polymeric microresonators - Research Collection

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Author

Kuehne, Stéphane

Hierold, Christofer

Date

2009

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1088/0960-1317/19/6/065018

Journal / series

Journal of Micromechanics and Microengineering

Volume

19(6)

Pages / Article No.

065018

Publisher

IOP Publishing

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ETH Bibliography

yes

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