Alpha- vs. beta-W nanocrystalline thin films: A comprehensive study of sputter parameters and resulting materials' properties
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Date
2015Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Thin Solid FilmsVolume
Pages / Article No.
Publisher
ElsevierSubject
Sputter deposition; Tungsten; Thin films; Nanocrystalline; X-ray diffraction; Resistivity; Direct-current substrate bias; Crystalline phaseOrganisational unit
03692 - Spolenak, Ralph / Spolenak, Ralph
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ETH Bibliography
yes
Altmetrics