Al+ ion implanted on-axis <0001>semi-insulating 4H-SiC
dc.contributor.author
Nipoti, Roberta
dc.contributor.author
Parisini, Antonella
dc.contributor.author
Carnera, Alberto
dc.contributor.author
Albonetti, Cristiano
dc.contributor.author
Vantaggio, Salvatore
dc.contributor.author
Grossner, Ulrike
dc.date.accessioned
2017-06-11T22:38:03Z
dc.date.available
2017-06-11T22:38:03Z
dc.date.issued
2015
dc.identifier.isbn
978-3-03835-478-9
dc.identifier.issn
0255-5476
dc.identifier.issn
1662-9752
dc.identifier.other
10.4028/www.scientific.net/MSF.821-823.399
dc.identifier.uri
http://hdl.handle.net/20.500.11850/109363
dc.language.iso
en
dc.publisher
Trans Tech Publications
dc.title
Al+ ion implanted on-axis <0001>semi-insulating 4H-SiC
dc.type
Conference Paper
ethz.book.title
Silicon Carbide and Related Materials 2014
ethz.journal.title
Materials Science Forum
ethz.journal.volume
821-823
ethz.pages.start
399
ethz.pages.end
402
ethz.event
European Conference on Silicon Carbide & Related Materials (ECSCRM 2014)
ethz.event.location
Grenoble, France
ethz.event.date
September 21-25, 2014
ethz.identifier.nebis
000029733
ethz.publication.place
Aedermannsdorf
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::09480 - Grossner, Ulrike / Grossner, Ulrike
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::09480 - Grossner, Ulrike / Grossner, Ulrike
ethz.date.deposited
2017-06-11T22:38:26Z
ethz.source
ECIT
ethz.identifier.importid
imp593653e0cb5c753357
ethz.ecitpid
pub:170440
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T18:53:23Z
ethz.rosetta.lastUpdated
2025-02-06T20:57:45Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [36753]