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dc.contributor.author
Chikkadi, Kiran
dc.contributor.author
Liu, Wei
dc.contributor.author
Roman, Cosmin
dc.contributor.author
Haluska, Miroslav
dc.contributor.author
Hierold, Christofer
dc.date.accessioned
2017-06-11T22:51:57Z
dc.date.available
2017-06-11T22:51:57Z
dc.date.issued
2015
dc.identifier.issn
1084-6999
dc.identifier.other
10.1109/MEMSYS.2015.7050951
dc.identifier.uri
http://hdl.handle.net/20.500.11850/109829
dc.language.iso
en
dc.publisher
IEEE
dc.title
Wafer-scale integration of carbon nanotube transistors as process monitors for sensing applications
dc.type
Conference Paper
ethz.journal.title
IEEE International Conference on Micro Electro Mechanical Systems
ethz.journal.issue
28
ethz.pages.start
312
ethz.pages.end
315
ethz.event
28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
ethz.event.location
Estoril, Portugal
ethz.event.date
January 18-22, 2015
ethz.notes
.
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-11T22:52:35Z
ethz.source
ECIT
ethz.identifier.importid
imp593653e945c2646477
ethz.ecitpid
pub:170962
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T22:11:25Z
ethz.rosetta.lastUpdated
2018-11-02T21:26:45Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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