Metadata only
Author
Cornila, C.
Hierlemann, A.
Lenggenhager, R.
Malcovati, P.
Baltes, H.
Noetzel, G.
Weimar, U.
Göpel, W.
Date
1995-04Type
- Conference Paper
Publication status
publishedJournal / series
Sensors and Actuators. B, ChemicalVolume
Pages
Publisher
ElsevierEvent
Subject
Capacitive sensors; CMOS technology; Polymer coatingOrganisational unit
03684 - Hierlemann, Andreas
Notes
Published online 31 January 2002.More
Show all metadata