Capacitive Sensors in CMOS Technology with Polymer Coating

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Author
Cornila, C.
Hierlemann, A.
Lenggenhager, R.
Malcovati, P.
Baltes, H.
Noetzel, G.
Weimar, U.
Göpel, W.
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Date
1995-04
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Sensors and Actuators B: Chemical
Volume
25(1-3)
Pages / Article No.
357 - 361
Publisher
Elsevier
Event
5th International Meeting on Chemical Sensors, Rome, Italy, July 11-14, 1994
Subject
Capacitive sensors; CMOS technology; Polymer coating
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas  
Notes
Published online 31 January 2002.
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Citations
Cited 43 times in Scopus
ETH Bibliography
yes
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