Capacitive Sensors in CMOS Technology with Polymer Coating

Metadata only

Author

Cornila, C.

Hierlemann, A.

Lenggenhager, R.

Malcovati, P.

Baltes, H.

Noetzel, G.

Weimar, U.

Göpel, W.

Date

1995-04

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Sensors and Actuators B: Chemical

Volume

25(1-3)

Pages / Article No.

357 - 361

Publisher

Elsevier

Event

5th International Meeting on Chemical Sensors, Rome, Italy, July 11-14, 1994

Subject

Capacitive sensors; CMOS technology; Polymer coating

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

Notes

Published online 31 January 2002.

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ETH Bibliography

yes

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Research Collection