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dc.contributor.author
Cornila, C.
dc.contributor.author
Hierlemann, A.
dc.contributor.author
Lenggenhager, R.
dc.contributor.author
Malcovati, P.
dc.contributor.author
Baltes, H.
dc.contributor.author
Noetzel, G.
dc.contributor.author
Weimar, U.
dc.contributor.author
Göpel, W.
dc.date.accessioned
2017-06-11T23:19:02Z
dc.date.available
2017-06-11T23:19:02Z
dc.date.issued
1995-04
dc.identifier.other
10.1016/0925-4005(95)85080-5
dc.identifier.uri
http://hdl.handle.net/20.500.11850/110798
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Capacitive sensors
dc.subject
CMOS technology
dc.subject
Polymer coating
dc.title
Capacitive Sensors in CMOS Technology with Polymer Coating
dc.type
Conference Paper
ethz.journal.title
Sensors and Actuators B: Chemical
ethz.journal.volume
25
ethz.journal.issue
1-3
ethz.pages.start
357
ethz.pages.end
361
ethz.event
5th International Meeting on Chemical Sensors
ethz.event.location
Rome, Italy
ethz.event.date
July 11-14, 1994
ethz.notes
Published online 31 January 2002.
ethz.identifier.nebis
000541558
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-11T23:19:54Z
ethz.source
ECIT
ethz.identifier.importid
imp593653fa8a64522733
ethz.ecitpid
pub:172063
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-26T18:58:36Z
ethz.rosetta.lastUpdated
2019-01-02T06:42:49Z
ethz.rosetta.versionExported
true
ethz.COinS
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