Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment
- Journal Article
Journal / seriesSensors and Actuators A: Physical
SubjectPolymer microresonators; Kelvin polarization force; MEMS; SU-8; Quality factor; Dielectrophoresis; Q-enhancement; Q-control; Self-excitation
Organisational unit03609 - Hierold, Christofer
NotesReceived 29 June 2007, revised 2 October 2007, accepted 10 January 2008, Available online 19 January 2008.
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