Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments

Metadata only

Author

Date

2015

Type

Conference Paper

ETH Bibliography

no

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Publication status

published

External links

Editor

Book title

Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems: 4-6 May 2015, Barcelona, Spain

Journal / series

Proceedings of SPIE

Volume

9517

Pages / Article No.

95171X

Publisher

SPIE

Event

Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, Barcelona, Spain, May 4-6, 2015

Subject

Microforce sensors; Meander spring; Deep reactive ion etching (DRIE); Piezoresistive Wheatstone bridge; Joining technique

Organisational unit

03388 - Tröster, Gerhard (emeritus)

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ETH Bibliography

no

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