LIGA and its applications

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Date
2008
Type
  • Edited Volume
Publication status
published
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Editor
Saile, Volker
Wallrabe, Ulrike
Tabata, Osamu
Korvink, Jan G.
Journal / series
Advanced micro and nanosystems
Volume
7
Publisher
WILEY-VCH
Organisational unit
03609 - Hierold, Christofer
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