Metal-oxide-based Monolithic CMOS Microhotplate System for Operating Temperatures up to 500°C

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Author

Date

2004

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

Book title

Technical Digest of the 10th International Meeting on Chemical Sensors

Journal / series

Chemical Sensors

Volume

20(Supplement B)

Pages / Article No.

114 - 115

Publisher

Japan Association of Chemical Sensors

Event

10th International Meeting on Chemical Sensors (IMCS-10), Tsukuba, Japan, July 11-14, 2004

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

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ETH Bibliography

yes

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Research Collection