Integrated metal-oxide microsensor array of micro-hotplates with MOS-transistor heater

Metadata only

Author

Date

2003

Type

Conference Paper

ETH Bibliography

yes

Altmetrics

Publication status

published

Book title

Eurosensors XVII : the 17th European Conference on Solid-State Transducers

Pages / Article No.

661 - 662

Publisher

Elsevier

Event

17th European Conference on Solid-State Transducers (Eurosensors XVII), Guimaraes, Portugal, September 21-24, 2003

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

More

ETH Bibliography

yes

Altmetrics

Research Collection