CMOS-MEMS - Present and Future
dc.contributor.author
Baltes, Henry
dc.contributor.author
Brand, Oliver
dc.contributor.author
Hierlemann, Andreas
dc.contributor.author
Lange, Dirk
dc.contributor.author
Hagleitner, Christoph
dc.date.accessioned
2017-06-12T00:36:04Z
dc.date.available
2017-06-12T00:36:04Z
dc.date.issued
2002
dc.identifier.isbn
0-7803-7185-2
dc.identifier.isbn
0-7803-7186-0
dc.identifier.other
10.1109/MEMSYS.2002.984302
dc.identifier.uri
http://hdl.handle.net/20.500.11850/112821
dc.language.iso
en
dc.publisher
IEEE
dc.title
CMOS-MEMS - Present and Future
dc.type
Conference Paper
ethz.book.title
Technical digest : MEMS 2002, the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 20-24, 2002
ethz.pages.start
459
ethz.pages.end
466
ethz.event
15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002)
ethz.event.location
Las Vegas, NV, USA
ethz.event.date
January 20-24, 2002
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-12T00:38:01Z
ethz.source
ECIT
ethz.identifier.importid
imp5936541b027d056712
ethz.ecitpid
pub:174431
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-26T05:24:15Z
ethz.rosetta.lastUpdated
2018-11-02T22:22:28Z
ethz.rosetta.versionExported
true
ethz.COinS
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