Controlled Deposition of NIST-traceable Nanoparticles as Additional Size Standards for Photomask Applications
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Date
2008Type
- Conference Paper
ETH Bibliography
no
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Publication status
publishedExternal links
Book title
Metrology, Inspection, and Process Control for Microlithography XXIIJournal / series
Proceedings of SPIEVolume
Pages / Article No.
Publisher
SPIEEvent
Subject
Particle standard; Surface inspection tools; Electrostatic deposition; NIST-traceable sizeOrganisational unit
03887 - Wang, Jing / Wang, Jing
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ETH Bibliography
no
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