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dc.contributor.author
Kim, Jung Hyeun
dc.contributor.author
Fissan, Heinz
dc.contributor.author
Asbach, Christof
dc.contributor.author
Yook, Se-Jin
dc.contributor.author
Wang, Jing
dc.contributor.author
Pui, David Y.H
dc.date.accessioned
2017-06-12T01:01:19Z
dc.date.available
2017-06-12T01:01:19Z
dc.date.issued
2006
dc.identifier.issn
1071-1023
dc.identifier.issn
0734-211X
dc.identifier.issn
2166-2746
dc.identifier.issn
2166-2754
dc.identifier.other
10.1116/1.2214712 
dc.identifier.uri
http://hdl.handle.net/20.500.11850/113090
dc.language.iso
en
dc.publisher
American Institute of Physics
dc.title
Effect of reverse flow by differential pressure on the protection of critical surfaces against particle contamination
dc.type
Journal Article
ethz.journal.title
Journal of Vacuum Science & Technology B
ethz.journal.volume
24
ethz.pages.start
1844
ethz.pages.end
1849
ethz.notes
.
ethz.identifier.nebis
000604586
ethz.publication.place
Melville, NY
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02115 - Dep. Bau, Umwelt und Geomatik / Dep. of Civil, Env. and Geomatic Eng.::02608 - Institut für Umweltingenieurwiss. / Institute of Environmental Engineering::03887 - Wang, Jing / Wang, Jing
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02115 - Dep. Bau, Umwelt und Geomatik / Dep. of Civil, Env. and Geomatic Eng.::02608 - Institut für Umweltingenieurwiss. / Institute of Environmental Engineering::03887 - Wang, Jing / Wang, Jing
ethz.date.deposited
2017-06-12T01:05:36Z
ethz.source
ECIT
ethz.identifier.importid
imp59365420938f886320
ethz.ecitpid
pub:174754
ethz.eth
no
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T19:08:19Z
ethz.rosetta.lastUpdated
2018-11-02T22:27:14Z
ethz.rosetta.versionExported
true
ethz.COinS
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