Permanent link
https://doi.org/10.3929/ethz-b-000114531Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
Self-aligned; Palladium; Ion milling; Multi-gateOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Funding
153292 - Q-factor enhancement in resonating CNTs (SNF)
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