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dc.contributor.author
Jenni, Laura Vera
dc.contributor.author
Weichart, Johannes
dc.contributor.author
Muoth, Matthias
dc.contributor.author
Chikkadi, Kiran
dc.contributor.author
Haluška, Miroslav
dc.contributor.author
Hierold, Christofer
dc.date.accessioned
2020-02-06T15:22:14Z
dc.date.available
2017-06-12T03:15:09Z
dc.date.available
2020-02-06T15:07:51Z
dc.date.available
2020-02-06T15:22:14Z
dc.date.issued
2016-03
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2016.03.013
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/114531
dc.identifier.doi
10.3929/ethz-b-000114531
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
Elsevier
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
Self-aligned
en_US
dc.subject
Palladium
en_US
dc.subject
Ion milling
en_US
dc.subject
Multi-gate
en_US
dc.title
Fabrication of high-resolution, self-aligned palladium electrodes
en_US
dc.type
Conference Paper
dc.rights.license
In Copyright - Non-Commercial Use Permitted
dc.date.published
2016-03-09
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
153
en_US
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
105
en_US
ethz.pages.end
109
en_US
ethz.size
7 p.
en_US
ethz.version.deposit
acceptedVersion
en_US
ethz.event
41th Conference on Micro and Nano Engineering (MNE 2015)
en_US
ethz.event.location
The Hague, Netherlands
en_US
ethz.event.date
September 21-24, 2015
en_US
ethz.grant
Q-factor enhancement in resonating CNTs
en_US
ethz.identifier.scopus
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.grant.agreementno
153292
ethz.grant.fundername
SNF
ethz.grant.funderDoi
10.13039/501100001711
ethz.grant.program
Projektförderung in Mathematik, Natur- und Ingenieurwissenschaften (Abteilung II)
ethz.date.deposited
2017-06-12T03:21:20Z
ethz.source
ECIT
ethz.identifier.importid
imp59365440a888775359
ethz.ecitpid
pub:176320
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2017-07-13T16:38:49Z
ethz.rosetta.lastUpdated
2020-02-16T00:04:23Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Fabrication%20of%20high-resolution,%20self-aligned%20palladium%20electrodes&rft.jtitle=Microelectronic%20Engineering&rft.date=2016-03&rft.volume=153&rft.spage=105&rft.epage=109&rft.issn=0167-9317&1873-5568&rft.au=Jenni,%20Laura%20Vera&Weichart,%20Johannes&Muoth,%20Matthias&Chikkadi,%20Kiran&Halu%C5%A1ka,%20Miroslav&rft.genre=proceeding&rft_id=info:doi/10.1016/j.mee.2016.03.013&
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