High-resolution Kelvin probe force microscopy of active nanoelectronic devices

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Author
Wagner, Tino
Date
2016
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-010615234
Publication status
published
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Contributors
Examiner: Stemmer, Andreas
Examiner: Gotsmann, Bernd
Publisher
ETH-Zürich
Subject
ATOMIC FORCE MICROSCOPES, AFM + ATOMIC FORCE MICROSCOPY; NANOELEKTRONIK; NANOSTRUKTURIERTE MATERIALIEN (PHYSIK DER KONDENSIERTEN MATERIE); NANOELECTRONICS; NANOSTRUCTURED MATERIALS (CONDENSED MATTER PHYSICS); RASTERKRAFTMIKROSKOPE, RKM + RASTERKRAFTMIKROSKOPIE
Organisational unit
02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.
03444 - Stemmer, Andreas / Stemmer, Andreas  
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