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dc.contributor.author
Eberle, Gregory
dc.contributor.author
Pude, Frank
dc.contributor.author
Schmidt, Michael
dc.contributor.author
Wegener, Konrad
dc.date.accessioned
2017-06-12T03:54:55Z
dc.date.available
2017-06-12T03:54:55Z
dc.date.issued
2016-08
dc.identifier.issn
0169-4332
dc.identifier.issn
1873-5584
dc.identifier.other
10.1016/j.apsusc.2016.04.032
dc.identifier.uri
http://hdl.handle.net/20.500.11850/114969
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Sapphire
dc.subject
Waterjet orifice
dc.subject
Laser
dc.subject
Femtosecond
dc.subject
Ablation
dc.subject
Etching
dc.title
Laser surface and subsurface modification of sapphire using femtosecond pulses
dc.type
Journal Article
ethz.journal.title
Applied Surface Science
ethz.journal.volume
378
ethz.journal.abbreviated
Appl. surf. sci.
ethz.pages.start
504
ethz.pages.end
512
ethz.notes
Published online 8 April 2016.
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
000031422
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02130 - Departement Maschinenbau und Verfahrenstechnik / Department of Mechanical and Process Engineering::02623 - Institut für Werkzeugmaschinen und Fertigung (IWF) / Institute of Machine Tools and Manufacturing (IWF)::03641 - Wegener, Konrad
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02130 - Departement Maschinenbau und Verfahrenstechnik / Department of Mechanical and Process Engineering::02623 - Institut für Werkzeugmaschinen und Fertigung (IWF) / Institute of Machine Tools and Manufacturing (IWF)::03641 - Wegener, Konrad
ethz.date.deposited
2017-06-12T03:59:11Z
ethz.source
ECIT
ethz.identifier.importid
imp59365449f2c1135584
ethz.ecitpid
pub:176778
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T20:11:11Z
ethz.rosetta.lastUpdated
2018-01-10T07:25:33Z
ethz.rosetta.versionExported
true
ethz.COinS
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