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dc.contributor.author
Quack, Niels
dc.contributor.author
Blunier, Stefan
dc.contributor.author
Dual, Jurg
dc.contributor.author
Arnold, Martin
dc.contributor.author
Felder, Ferdinand
dc.contributor.author
Ebneter, Christian
dc.contributor.author
Rahim, Mohamed
dc.contributor.author
Zogg, H.
dc.date.accessioned
2017-06-08T20:22:00Z
dc.date.available
2017-06-08T20:22:00Z
dc.date.issued
2008
dc.identifier.issn
0924-4247
dc.identifier.other
10.1016/j.sna.2007.06.013
dc.identifier.uri
http://hdl.handle.net/20.500.11850/11686
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
RCED
dc.subject
Infrared
dc.subject
Tunable detector
dc.subject
MEMS
dc.subject
Micromirror
dc.title
Vertically moving micromirror for detectors in the mid infrared
dc.type
Journal Article
ethz.journal.title
Sensors and Actuators. A, Physical
ethz.journal.volume
143
ethz.journal.issue
1
ethz.journal.abbreviated
Sens. actuators, A, Phys.
ethz.pages.start
29
ethz.pages.end
33
ethz.event
20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007)
ethz.event.location
Kobe, Japan
ethz.event.date
January 21-25, 2007
ethz.notes
Received 30 March 2007, Accepted 6 June 2007, Available online 16 June 2007.
ethz.identifier.wos
ethz.identifier.nebis
000540889
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
02498 - Ott H. R., Dünnschichtphysik
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems::03307 - Dual, Jürg / Dual, Jürg
ethz.leitzahl.certified
02498 - Ott H. R., Dünnschichtphysik
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems::03307 - Dual, Jürg / Dual, Jürg
ethz.date.deposited
2017-06-08T20:22:23Z
ethz.source
ECIT
ethz.identifier.importid
imp59364c08c416987548
ethz.ecitpid
pub:22892
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-31T15:27:29Z
ethz.rosetta.lastUpdated
2020-02-14T05:29:38Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Vertically%20moving%20micromirror%20for%20detectors%20in%20the%20mid%20infrared&rft.jtitle=Sensors%20and%20Actuators.%20A,%20Physical&rft.date=2008&rft.volume=143&rft.issue=1&rft.spage=29&rft.epage=33&rft.issn=0924-4247&rft.au=Quack,%20Niels&Blunier,%20Stefan&Dual,%20Jurg&Arnold,%20Martin&Felder,%20Ferdinand&rft.genre=article&
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