Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors

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Author
Quack, Niels
Blunier, Stefan
Dual, Jurg
Arnold, Martin
Felder, Ferdinand
Ebneter, Christian
Rahim, Mohamed
Zogg, Hans
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Date
2008
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Journal of optics. A, Pure and applied optics
Volume
10(4)
Pages
044015
Publisher
Institute of Physics
Subject
tunable RCED; infrared detector; MEMS; micromirror
Organisational unit
02498 - Ott H. R., Dünnschichtphysik
Notes
Received 12 October 2007, accepted for publication 26 February 2008, Published 3 April 2008.
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