Metal direct nanoimprinting for photonics

Metadata only

Author

Date

2008

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Microelectronic Engineering

Volume

85(2)

Pages / Article No.

419 - 424

Publisher

Elsevier

Subject

Microforming; Coining; Microforging; Metamaterials; Nanoimprint lithography; Nano-printing

Organisational unit

03661 - Löffler, Jörg F. / Löffler, Jörg F.

Notes

Received 12 March 2007, Revised 9 August 2007, Accepted 12 August 2007, Available online 17 August 2007.

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