Metal direct nanoimprinting for photonics

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Author
Buzzi, Stefano
Robin, Franck
Callegari, Victor
Löffler, Jörg F.
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Date
2008
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Microelectronic Engineering
Volume
85(2)
Pages
419 - 424
Publisher
Elsevier
Subject
Microforming; Coining; Microforging; Metamaterials; Nanoimprint lithography; Nano-printing
Organisational unit
03661 - Löffler, Jörg F.
Notes
Received 12 March 2007, Revised 9 August 2007, Accepted 12 August 2007, Available online 17 August 2007.
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Citations
Cited 32 times in Web of Science
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