Metal direct nanoimprinting for photonics - Research Collection

Metadata only

Author

Buzzi, Stefano

Robin, Franck

Callegari, Victor

Löffler, Jörg F.

Date

2008

Type

Journal Article

Citations

Cited 34 times in Web of Science

Cited 37 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mee.2007.08.001

Journal / series

Microelectronic Engineering

Volume

85(2)

Pages / Article No.

419 - 424

Publisher

Elsevier

Subject

Microforming; Coining; Microforging; Metamaterials; Nanoimprint lithography; Nano-printing

Organisational unit

03661 - Löffler, Jörg F. / Löffler, Jörg F.

Notes

Received 12 March 2007, Revised 9 August 2007, Accepted 12 August 2007, Available online 17 August 2007.

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Citations

Cited 34 times in Web of Science

Cited 37 times in Scopus

ETH Bibliography

yes

Altmetrics