Monolayer Doping of Silicon through Grafting a Tailored Molecular Phosphorus Precursor onto Oxide-Passivated Silicon Surfaces

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Author
Alphazan, Thibault
Mathey, Laurent
Schwarzwälder, Martin
Lin, Tsung-Han
Rossini, Aaron J.
Wischert, Raphael
Enyedi, Virginie
Fontaine, Herve
Veillerot, Marc
Lesage, Anne
Emsley, Lyndon
Veyre, Laurent
Martin, Francois
Thieuleux, Chloe
Coperet, Christophe
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Date
2016
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Chemistry of Materials
Volume
28(11)
Pages
3634 - 3640
Publisher
American Chemical Society
Organisational unit
03872 - Copéret, Christophe
Notes
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