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dc.contributor.author
Fink, Johannes M.
dc.contributor.author
Kalaee, Mahmoud
dc.contributor.author
Pitanti, Alessandro
dc.contributor.author
Norte, Richard
dc.contributor.author
Heinzle, L.
dc.contributor.author
Davanço, Marcelo
dc.contributor.author
Srinivasan, Kartik
dc.contributor.author
Painter, Oskar
dc.date.accessioned
2018-09-13T14:29:48Z
dc.date.available
2017-06-12T10:40:17Z
dc.date.available
2018-09-13T14:29:48Z
dc.date.issued
2016
dc.identifier.other
10.1038/ncomms12396
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/119301
dc.identifier.doi
10.3929/ethz-b-000119301
dc.description.abstract
Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom—mechanical, optical and microwave—would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments.
en_US
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
Nature Publishing Group
en_US
dc.rights.uri
http://creativecommons.org/licenses/by/4.0/
dc.title
Quantum electromechanics on silicon nitride nanomembranes
en_US
dc.type
Journal Article
dc.rights.license
Creative Commons Attribution 4.0 International
dc.date.published
2016-08-03
ethz.journal.title
Nature Communications
ethz.journal.volume
7
en_US
ethz.pages.start
12396
en_US
ethz.size
10 p.
en_US
ethz.version.deposit
publishedVersion
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
007044158
ethz.publication.place
London
en_US
ethz.publication.status
published
en_US
ethz.date.deposited
2017-06-12T10:48:20Z
ethz.source
ECIT
ethz.identifier.importid
imp5936549e4b60987918
ethz.ecitpid
pub:181309
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2017-07-15T20:51:10Z
ethz.rosetta.lastUpdated
2018-12-02T13:35:25Z
ethz.rosetta.exportRequired
true
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true
ethz.COinS
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