Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm

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Author
Koch, J.
Feldmann, I.
Hattendorf, Bodo
Jakubowski, N.
Bolshov, M.
Günther, Detlef
Hergenröder, R.
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Date
2002-06
Type
  • Journal Article
Publication status
published
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Journal / series
Spectrochimica acta. Part B
Volume
57(6)
Pages / Article No.
1057 - 1070
Publisher
Elsevier
Subject
Laser ablation; Nd:YAG; Excimer; Inductively coupled-plasma mass spectrometry; Optical lithography; CaF2
Organisational unit
03512 - Günther, Detlef  
Notes
Received 28 February 2002, Accepted 2 May 2002, Published online 12 June 2002.
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