Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm
Publication status
publishedJournal / series
Spectrochimica acta. Part BVolume
Pages / Article No.
Publisher
ElsevierSubject
Laser ablation; Nd:YAG; Excimer; Inductively coupled-plasma mass spectrometry; Optical lithography; CaF2Organisational unit
03512 - Günther, Detlef / Günther, Detlef
Notes
Received 28 February 2002, Accepted 2 May 2002, Published online 12 June 2002.More
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