Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm

Metadata only

Author

Koch, J.

Feldmann, I.

Hattendorf, Bodo

Jakubowski, N.

Bolshov, M.

Günther, Detlef

Hergenröder, R.

Date

2002-06

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Spectrochimica acta. Part B

Volume

57(6)

Pages / Article No.

1057 - 1070

Publisher

Elsevier

Subject

Laser ablation; Nd:YAG; Excimer; Inductively coupled-plasma mass spectrometry; Optical lithography; CaF2

Organisational unit

03512 - Günther, Detlef / Günther, Detlef

Notes

Received 28 February 2002, Accepted 2 May 2002, Published online 12 June 2002.

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