Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm

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Author

Koch, J.

Feldmann, I.

Hattendorf, Bodo

Jakubowski, N.

Bolshov, M.

Günther, Detlef

Hergenröder, R.

Date

2002-06

Type

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Spectrochimica acta. Part B

Volume

57(6)

Pages / Article No.

1057 - 1070

Publisher

Elsevier

Subject

Laser ablation; Nd:YAG; Excimer; Inductively coupled-plasma mass spectrometry; Optical lithography; CaF2

Organisational unit

03512 - Günther, Detlef / Günther, Detlef

Notes

Received 28 February 2002, Accepted 2 May 2002, Published online 12 June 2002.

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