Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas - Research Collection

Metadata only

Autor(in)

Brandstatter, Markus

Abhari, Reza S.

Datum

2016-08

Typ

Journal Article

Zitate

6 Zitate in Web of Science

ETH Bibliographie

yes

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Publikationsstatus

published

Externe Links

https://doi.org/10.1016/j.sab.2016.06.007

Zeitschrift / Serie

Spectrochimica Acta. Part B, Atomic Spectroscopy

Band

122

Seiten / Artikelnummer

149 - 156

Verlag

Elsevier

Thema

Atomic Emission Spectroscopy; Laser Produced Plasma; Droplet Target; Vacuum Ultraviolet Emission; Extreme Ultraviolet Lithography

Organisationseinheit

03548 - Abhari, Reza S. / Abhari, Reza S.

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Zitate

6 Zitate in Web of Science

ETH Bibliographie

yes

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