Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas
Metadata only
Datum
2016-08Typ
- Journal Article
Publikationsstatus
publishedZeitschrift / Serie
Spectrochimica Acta. Part B, Atomic SpectroscopyBand
Seiten / Artikelnummer
Verlag
ElsevierThema
Atomic Emission Spectroscopy; Laser Produced Plasma; Droplet Target; Vacuum Ultraviolet Emission; Extreme Ultraviolet LithographyOrganisationseinheit
03548 - Abhari, Reza S. / Abhari, Reza S.