Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas
dc.contributor.author
Gambino, Nadia
dc.contributor.author
Rollinger, Bob
dc.contributor.author
Brandstatter, Markus
dc.contributor.author
Abhari, Reza S.
dc.date.accessioned
2017-06-12T12:15:04Z
dc.date.available
2017-06-12T12:15:04Z
dc.date.issued
2016-08
dc.identifier.issn
0584-8547
dc.identifier.other
10.1016/j.sab.2016.06.007
dc.identifier.uri
http://hdl.handle.net/20.500.11850/120262
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Atomic Emission Spectroscopy
dc.subject
Laser Produced Plasma
dc.subject
Droplet Target
dc.subject
Vacuum Ultraviolet Emission
dc.subject
Extreme Ultraviolet Lithography
dc.title
Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas
dc.type
Journal Article
ethz.journal.title
Spectrochimica Acta. Part B, Atomic Spectroscopy
ethz.journal.volume
122
ethz.journal.abbreviated
Spectrochim. acta, B At. spectrosc.
ethz.pages.start
149
ethz.pages.end
156
ethz.identifier.wos
ethz.identifier.nebis
000055430
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-12T12:16:17Z
ethz.source
ECIT
ethz.identifier.importid
imp593654b14551c95054
ethz.ecitpid
pub:182319
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T12:42:08Z
ethz.rosetta.lastUpdated
2021-02-14T14:32:29Z
ethz.rosetta.versionExported
true
ethz.COinS
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Journal Article [120850]