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dc.contributor.author
Züst, Simon
dc.contributor.author
Paul, Phillip
dc.contributor.author
Weiss, Lukas
dc.contributor.author
Wegener, Konrad
dc.contributor.editor
Hubbard, Peter
dc.date.accessioned
2021-07-28T06:51:05Z
dc.date.available
2017-06-12T12:58:31Z
dc.date.available
2018-09-12T12:06:47Z
dc.date.available
2021-07-28T06:51:05Z
dc.date.issued
2016-10
dc.identifier.issn
2405-8963
dc.identifier.other
10.1016/j.ifacol.2016.10.579
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/120805
dc.description.abstract
Thermal scanning probe lithography (t-SPL) is a promising technology to create patterns at the nanometre scale. So far, a commercially available t-SPL tool only exists for small, centimetre scale work pieces typically used in the university research environment. Scaling this technology to work with industry standard wafers requires much larger mechanical positioning units. These are subject to thermally induced deformations and consequently positioning errors. This work suggests a model based compensation of a mechanical positioning unit in combination with a direct position measurement enabled by the t-SPL patterning tool. Based on a linear model of the positioning unit, a Kalman based filter is designed, to estimate thermal errors during the patterning process and use position measurements between patterning phases for re-calibration. The presented filter does not require additional measurement equipment for the compensation. An application of the presented algorithm on an experimental set-up shows a significant reduction of thermally induced position errors.
en_US
dc.language.iso
en
en_US
dc.publisher
Elsevier
en_US
dc.subject
State-space model
en_US
dc.subject
Position estimation
en_US
dc.subject
Position error
en_US
dc.subject
Kalman filter
en_US
dc.subject
Active compensation
en_US
dc.title
Modelling and compensation of thermally induced positioning errors in a high precision positioning application
en_US
dc.type
Conference Paper
dc.date.published
2016-11-10
ethz.book.title
7th IFAC Symposium on Mechatronic Systems MECHATRONICS 2016. Proceedings
en_US
ethz.journal.title
IFAC-PapersOnLine
ethz.journal.volume
49
en_US
ethz.journal.issue
21
en_US
ethz.pages.start
347
en_US
ethz.pages.end
353
en_US
ethz.event
7th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2016)
en_US
ethz.event.location
Loughborough, UK
en_US
ethz.event.date
September 5-8, 2016
en_US
ethz.publication.place
Kidlington
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing::03641 - Wegener, Konrad / Wegener, Konrad
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing::03641 - Wegener, Konrad / Wegener, Konrad
ethz.date.deposited
2017-06-12T13:04:08Z
ethz.source
ECIT
ethz.identifier.importid
imp593654ba9882e24525
ethz.ecitpid
pub:182884
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-08-03T08:38:50Z
ethz.rosetta.lastUpdated
2022-03-29T10:45:36Z
ethz.rosetta.versionExported
true
ethz.COinS
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