Film Formation from HMDSO: Comparison of Direct Plasma Injection with Afterglow Injection using an Atmospheric Pressure Dielectric Barrier Discharge

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Author
Wallimann, Roger
Oberbossel, Gina
Butscher, Denis
Rudolf von Rohr, Philipp
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Date
2016
Type
  • Conference Paper
Publication status
published
External links
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Editor
Černák, Mirko
Hoder, Tomáš
Book title
Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistry with joint COST TD1208 Workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment, 11th-16th September 2016, Brno, Czech Republic
Pages
270 - 273
Publisher
Masarykova univerzita
Event
15th International Symposium on High Pressure Low Temperature Plasma Chemistry (HAKONE XV), Brno, Czech Republic, September 11-16, 2016
Organisational unit
03348 - Rudolf von Rohr, Philipp
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