Film Formation from HMDSO: Comparison of Direct Plasma Injection with Afterglow Injection using an Atmospheric Pressure Dielectric Barrier Discharge
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Date
2016Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedBook title
Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistry with joint COST TD1208 Workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment, 11th-16th September 2016, Brno, Czech RepublicPages / Article No.
Publisher
Masarykova univerzitaEvent
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
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Is original form of: https://doi.org/10.1051/epjap/2017160478
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ETH Bibliography
yes
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