Film Formation from HMDSO: Comparison of Direct Plasma Injection with Afterglow Injection using an Atmospheric Pressure Dielectric Barrier Discharge

Thumbnail
Metadata only
Author
Wallimann, Roger
Oberbossel, Gina
Butscher, Denis
Rudolf von Rohr, Philipp
Show all
Date
2016
Type
    Conference Paper
Publication status
published
Editor
Černák, Mirko
Hoder, Tomáš
Book title
Hakone XV: International Symposium on High Pressure Low Temperature Plasma Chemistry with joint COST TD1208 Workshop Non-Equilibrium Plasmas with Liquids for Water and Surface Treatment, 11th-16th September 2016, Brno, Czech Republic
Pages / Article No.
270 - 273
Publisher
Masarykova univerzita
Event
15th International Symposium on High Pressure Low Temperature Plasma Chemistry (HAKONE XV), Brno, Czech Republic, September 11-16, 2016
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)  
Related publications and datasets
More
Show all metadata
ETH Bibliography
yes
Altmetrics