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dc.contributor.author
Lang, Udo
dc.contributor.author
Rüst, Philipp
dc.contributor.author
Dual, Jürg
dc.date.accessioned
2017-06-08T20:32:19Z
dc.date.available
2017-06-08T20:32:19Z
dc.date.issued
2008
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2008.01.051
dc.identifier.uri
http://hdl.handle.net/20.500.11850/12203
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
PEDOT/PSS
dc.subject
Baytron
dc.subject
Strain gauge factor
dc.subject
Lift-off
dc.subject
Bulge test
dc.title
Towards fully polymeric MEMS
dc.type
Journal Article
ethz.title.subtitle
Fabrication and testing of PEDOT/PSS strain gauges
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
85
ethz.journal.issue
5-6
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
1050
ethz.pages.end
1053
ethz.notes
Received 7 October 2007, Revised 18 December 2007, Accepted 10 January 2008, Available online 26 January 2008.
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems::03307 - Dual, Jürg / Dual, Jürg
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02618 - Institut für Mechanische Systeme / Institute of Mechanical Systems::03307 - Dual, Jürg / Dual, Jürg
ethz.date.deposited
2017-06-08T20:32:31Z
ethz.source
ECIT
ethz.identifier.importid
imp59364c13005ad35981
ethz.ecitpid
pub:23499
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T21:18:49Z
ethz.rosetta.lastUpdated
2018-10-01T06:20:21Z
ethz.rosetta.versionExported
true
ethz.COinS
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