Fabrication of Fresnel zone plates by holography in the extreme ultraviolet region

Metadata only

Author

Date

2008

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Volume

26(6)

Pages / Article No.

2160 - 2163

Publisher

American Institute of Physics

Event

The 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2008), Portland, OR, USA, May 27-30, 2008

Organisational unit

03562 - Van der Veen, Johannes

Notes

Received 18 June 2008, Accepted 25 August 2008, Published 1 December 2008.

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