In situ characterization of block copolymer ordering on chemically nanopatterned surfaces by time-resolved small angle x-ray scattering

Thumbnail
Metadata only
Author
Stuen, K. O.
Liu, C.
Welander, A. M.
Liu, G.
Pablo, J. J. de
Nealey, P. F.
Satapathy, D. K.
Nygård, K.
Bunk, O.
Solak, H. H.
Veen, Johannes F. van der
Show all
Date
2008
Type
    Conference Paper
Publication status
published
External links
Journal / series
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Volume
26(6)
Pages / Article No.
2504 - 2508
Publisher
American Institute of Physics
Event
EIPBN 2008: The 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Portland, Oregon, May 27-30, 2008
Subject
annealing; nanopatterning; polymer blends; polymer films; scanning electron microscopy; surface chemistry; X-ray scattering
Organisational unit
03562 - Van der Veen, Johannes  
Notes
Received 7 June 2008, Accepted 2 September 2008, Published 1 December 2008.
More
Show all metadata
ETH Bibliography
yes
Altmetrics