In situ characterization of block copolymer ordering on chemically nanopatterned surfaces by time-resolved small angle x-ray scattering
Publication status
publishedExternal links
Journal / series
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaVolume
Pages / Article No.
Publisher
American Institute of PhysicsEvent
Subject
annealing; nanopatterning; polymer blends; polymer films; scanning electron microscopy; surface chemistry; X-ray scatteringOrganisational unit
03562 - Van der Veen, Johannes
Notes
Received 7 June 2008, Accepted 2 September 2008, Published 1 December 2008.More
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