Monolithic resonant cantilever-based CMOS microsystems for biochemical sensing

Metadata only

Author

Date

2008

Type

Journal Article

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

Journal / series

IEEE Transactions on Circuits and Systems I: Regular Papers

Volume

55(9)

Pages / Article No.

2551 - 2560

Publisher

IEEE

Subject

Biosensor; chemical sensor; CMOS; liquid phase; monolithic integration; resonant cantilever

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

Notes

First Published 2008-04-18, Current Version Published 2008-10-31.

More

ETH Bibliography

yes

Altmetrics

Research Collection