Monolithic resonant cantilever-based CMOS microsystems for biochemical sensing - Research Collection

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Author

Yue, Li

Vancura, Cyril

Kirstein, Kay-Uwe

Lichtenberg, Jan

Hierlemann, Andreas

Date

2008

Type

Journal Article

Citations

Cited 13 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1109/TCSI.2008.922027

Journal / series

IEEE Transactions on Circuits and Systems I: Regular Papers

Volume

55(9)

Pages / Article No.

2551 - 2560

Publisher

IEEE

Subject

Biosensor; chemical sensor; CMOS; liquid phase; monolithic integration; resonant cantilever

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

Notes

First Published 2008-04-18, Current Version Published 2008-10-31.

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Citations

Cited 13 times in Web of Science

ETH Bibliography

yes

Altmetrics