Monolithic resonant cantilever-based CMOS microsystems for biochemical sensing
Metadata only
Date
2008Type
- Journal Article
ETH Bibliography
yes
Altmetrics
Publication status
publishedExternal links
Journal / series
IEEE Transactions on Circuits and Systems I: Regular PapersVolume
Pages / Article No.
Publisher
IEEESubject
Biosensor; chemical sensor; CMOS; liquid phase; monolithic integration; resonant cantileverOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
First Published 2008-04-18, Current Version Published 2008-10-31.More
Show all metadata
ETH Bibliography
yes
Altmetrics