Semiconductor-based chemical microsensors
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Date
2006Type
- Book Chapter
ETH Bibliography
yes
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Publication status
publishedExternal links
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Editor
Book title
MEMS : a practical guide to design, analysis, and applicationsPages / Article No.
Publisher
AndrewOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
03263 - Baltes, Henry
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ETH Bibliography
yes
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