Diamond-Coated Cantilevers for Scanning Capacitance Microscopy Applications
dc.contributor.author
Yabuhara, Hidehiko
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-12T19:23:53Z
dc.date.available
2017-06-12T19:23:53Z
dc.date.issued
2001-09
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/S0026-2714(01)00190-1
dc.identifier.uri
http://hdl.handle.net/20.500.11850/127697
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Diamond-Coated Cantilevers for Scanning Capacitance Microscopy Applications
dc.type
Journal Article
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
41
ethz.journal.issue
9-10
ethz.journal.abbreviated
Microelectron. Reliab.
ethz.pages.start
1459
ethz.pages.end
1463
ethz.identifier.scopus
ethz.identifier.nebis
010847263
ethz.publication.place
Kidlington
ethz.publication.status
published
ethz.leitzahl
03228 - Fichtner, Wolfgang
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
ethz.date.deposited
2017-06-12T19:24:36Z
ethz.source
ECIT
ethz.identifier.importid
imp59365533c02ad68616
ethz.ecitpid
pub:190568
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T14:33:01Z
ethz.rosetta.lastUpdated
2020-02-14T17:57:00Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Diamond-Coated%20Cantilevers%20for%20Scanning%20Capacitance%20Microscopy%20Applications&rft.jtitle=Microelectronics%20Reliability&rft.date=2001-09&rft.volume=41&rft.issue=9-10&rft.spage=1459&rft.epage=1463&rft.issn=0026-2714&1872-941X&rft.au=Yabuhara,%20Hidehiko&Ciappa,%20Mauro&Fichtner,%20Wolfgang&rft.genre=article&rft_id=info:doi/10.1016/S0026-2714(01)00190-1&
Files in this item
| Files | Size | Format | Open in viewer |
|---|---|---|---|
|
There are no files associated with this item. |
|||
Publication type
-
Journal Article [130494]