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dc.contributor.author
Sessi, Violetta
dc.contributor.author
Seichepine, Florent
dc.contributor.author
Pregl, Sebastian
dc.contributor.author
Szabó, Nadine
dc.contributor.author
Hierlemann, Andreas
dc.contributor.author
Mikolajick, Thomas
dc.contributor.author
Weber, Walter M.
dc.contributor.author
Frey, Urs
dc.date.accessioned
2020-02-20T10:22:07Z
dc.date.available
2017-06-12T19:29:09Z
dc.date.available
2020-02-20T10:22:07Z
dc.date.issued
2016
dc.identifier.isbn
978-0-9798064-9-0
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/127907
dc.description.abstract
We report on a new sensor platform for chemical sensing featuring 1024 individually addressable field-effect transistors (FETs), based on small bundles of nominally undoped Si nanowires (SiNWs). The SiNW devices are integrated directly on top of control and readout circuits fabricated in complementary metal-oxide-semiconductor (CMOS) technology. The sensing mechanism is based on electrical field tuning of the conductivity through Schottky junctions at the metal/Si nanowire interfaces [1]. We show integration, electrical measurements and pH-sensing of a high-density array (≥100 devices/mm2) with a sensing area of 1 x 5μm2 per sensor element.
en_US
dc.language.iso
en
en_US
dc.publisher
Chemical and Biological Microsystems Society
en_US
dc.subject
Silicon nanowires
en_US
dc.subject
Field-effect transistor
en_US
dc.subject
CMOS
en_US
dc.subject
Dielectrophoresis
en_US
dc.subject
Chemical sensor
en_US
dc.title
Integrating bottom-up grown silicon nanowires on a CMOS chip to realize high-density transistor arrays for chemical sensing
en_US
dc.type
Other Conference Item
ethz.book.title
20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2016)
en_US
ethz.pages.start
1118
en_US
ethz.pages.end
1119
en_US
ethz.event
20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2016)
en_US
ethz.event.location
Dublin, Ireland
en_US
ethz.event.date
October 9-13, 2016
en_US
ethz.notes
Poster abstract. Poster presentation on October 11, 2016.
en_US
ethz.grant
Seamless Integration of Neurons with CMOS Microelectronics
en_US
ethz.publication.place
San Diego, CA
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.grant.agreementno
267351
ethz.grant.agreementno
267351
ethz.grant.agreementno
267351
ethz.grant.agreementno
267351
ethz.grant.agreementno
267351
ethz.grant.fundername
EC
ethz.grant.fundername
EC
ethz.grant.fundername
EC
ethz.grant.fundername
EC
ethz.grant.fundername
EC
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.program
FP7
ethz.grant.program
FP7
ethz.grant.program
FP7
ethz.grant.program
FP7
ethz.grant.program
FP7
ethz.date.deposited
2017-06-12T19:29:41Z
ethz.source
ECIT
ethz.identifier.importid
imp59365537070ab93628
ethz.ecitpid
pub:190802
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
dc.relation.isnodouble
129471
*
dc.relation.isnodouble
129468
*
dc.relation.isnodouble
129465
*
ethz.rosetta.installDate
2017-07-20T14:55:18Z
ethz.rosetta.lastUpdated
2022-03-29T01:02:21Z
ethz.rosetta.versionExported
true
ethz.COinS
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