32-Channel Integrated Electrical Impedance Sensors on a Multi-Functional Neural Microelectrode Array Platform
Abstract
An integrated measurement platform was implemented to make in-vitro impedance measurements of neuronal cells on a multi-functional CMOS microelectrode array (MEA). This high-density array is made of 59’760 platinum microelectrodes with a pitch of 13.5μm. Impedance sensing can be performed through 32 electrodes in parallel, while the electrode sites can be arbitrarily chosen on the array. A wave generator was also integrated on chip to perform impedance spectroscopy within a wide frequency range from 1Hz to 1MHz. For a proof of concept, we show the magnitude and phase plots of platinum electrode-electrolyte interface impedances for different electrode sizes at different frequency ranges. Show more
Permanent link
https://doi.org/10.3929/ethz-b-000127911Publication status
publishedExternal links
Book title
Proceedings of the 30th anniversary Eurosensors Conference – Eurosensors 2016Journal / series
Procedia EngineeringVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
CMOS; Microelectrode array (MEA); Electrical impedance spectroscopy (EIS); Electrophysiology; Lock-in amplifiersOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
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