Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection
Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
Piezoresistive cantilever; CMOS cantilever; Force detectionOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Available online 2 March 2006.More
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