Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection - Research Collection

Metadata only

Author

Villanueva, Guillermo

Pérez-Murano, Francesc

Zimmermann, Martin

Lichtenberg, Jan

Date

2006-04

Type

Conference Paper

Citations

Cited 22 times in Web of Science

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

https://doi.org/10.1016/j.mee.2006.01.223

Journal / series

Microelectronic Engineering

Volume

83(4-9)

Pages / Article No.

1302 - 1305

Publisher

Elsevier

Event

31st International Conference on Micro- and Nano-Engineering 2005 (MNE 2005), Vienna, Austria, September 19-22, 2005

Subject

Piezoresistive cantilever; CMOS cantilever; Force detection

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

Notes

Available online 2 March 2006.

More

Show all metadata

Citations

Cited 22 times in Web of Science

ETH Bibliography

yes

Altmetrics