Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

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Author
Villanueva, Guillermo
Pérez-Murano, Francesc
Zimmermann, Martin
Lichtenberg, Jan
Bausells, Joan
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Date
2006-04
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Microelectronic engineering
Volume
83(4-9)
Pages
1302 - 1305
Publisher
Elsevier
Event
31st International Conference on Micro- and Nano-Engineering 2005 (MNE 2005), Vienna, Austria, September 19-22, 2005
Subject
Piezoresistive cantilever; CMOS cantilever; Force detection
Organisational unit
03684 - Hierlemann, Andreas
Notes
Available online 2 March 2006.
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