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dc.contributor.author
Rothe, Joerg
dc.contributor.author
Frey, Olivier
dc.contributor.author
Madangopal, Rajtarun
dc.contributor.author
Rickus, Jenna
dc.contributor.author
Hierlemann, Andreas
dc.date.accessioned
2019-06-13T14:47:53Z
dc.date.available
2017-06-12T19:58:41Z
dc.date.available
2019-06-13T14:47:53Z
dc.date.issued
2017-01
dc.identifier.issn
1424-8220
dc.identifier.other
10.3390/s17010022
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/128776
dc.identifier.doi
10.3929/ethz-b-000128776
dc.description.abstract
Surface modification of microelectrodes is a central step in the development of microsensors and microsensor arrays. Here, we present an electrodeposition scheme based on voltage pulses. Key features of this method are uniformity in the deposited electrode coatings, flexibility in the overall deposition area, i.e., the sizes and number of the electrodes to be coated, and precise control of the surface texture. Deposition and characterization of four different materials are demonstrated, including layers of high-surface-area platinum, gold, conducting polymer poly(ethylenedioxythiophene), also known as PEDOT, and the non-conducting polymer poly(phenylenediamine), also known as PPD. The depositions were conducted using a fully integrated complementary metal-oxide-semiconductor (CMOS) chip with an array of 1024 microelectrodes. The pulsed potentiostatic deposition scheme is particularly suitable for functionalization of individual electrodes or electrode subsets of large integrated microelectrode arrays: the required deposition waveforms are readily available in an integrated system, the same deposition parameters can be used to functionalize the surface of either single electrodes or large arrays of thousands of electrodes, and the deposition method proved to be robust and reproducible for all materials tested.
en_US
dc.format
application/pdf
en_US
dc.language.iso
en
en_US
dc.publisher
MDPI
en_US
dc.rights.uri
http://creativecommons.org/licenses/by/4.0/
dc.subject
Electrodeposition
en_US
dc.subject
Microelectrode array
en_US
dc.subject
Pulse potential waveform
en_US
dc.subject
Voltage pulses
en_US
dc.subject
Pulsed potentiostatic deposition
en_US
dc.subject
Complementary metal-oxide-semiconductor (CMOS)
en_US
dc.subject
Poly(ethylenedioxythiophene) PEDOT
en_US
dc.subject
Platinum
en_US
dc.subject
Gold
en_US
dc.subject
Poly(phenylenediamine) PPD
en_US
dc.title
Robust Functionalization of Large Microelectrode Arrays by Using Pulsed Potentiostatic Deposition
en_US
dc.type
Journal Article
dc.rights.license
Creative Commons Attribution 4.0 International
dc.date.published
2016-12-23
ethz.journal.title
Sensors
ethz.journal.volume
17
en_US
ethz.journal.issue
1
en_US
ethz.pages.start
22
en_US
ethz.size
13 p.
en_US
ethz.version.deposit
publishedVersion
en_US
ethz.grant
Seamless Integration of Neurons with CMOS Microelectronics
en_US
ethz.grant
The Body on a Chip - Human 3-D tissue analogues in microfluidic systems
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
005634210
ethz.publication.place
Basel
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.grant.agreementno
267351
ethz.grant.agreementno
142440
ethz.grant.fundername
EC
ethz.grant.fundername
SNF
ethz.grant.funderDoi
10.13039/501100000780
ethz.grant.funderDoi
10.13039/501100001711
ethz.grant.program
FP7
ethz.grant.program
Ambizione
ethz.date.deposited
2017-06-12T19:59:40Z
ethz.source
ECIT
ethz.identifier.importid
imp5936554811d6710420
ethz.ecitpid
pub:191703
ethz.eth
yes
en_US
ethz.availability
Open access
en_US
ethz.rosetta.installDate
2017-07-15T04:44:32Z
ethz.rosetta.lastUpdated
2019-06-13T14:48:04Z
ethz.rosetta.versionExported
true
ethz.COinS
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