Dielectrophoresis-Assisted Integration of 1024 Carbon Nanotube Sensors into a CMOS Microsystem

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Author
Seichepine, Florent
Rothe, Jörg
Dudina, Alexandra
Hierlemann, Andreas
Frey, Urs
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Date
2017-05-03
Type
  • Journal Article
Publication status
published
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Journal / series
Advanced Materials
Volume
29(17)
Pages
1606852
Publisher
Wiley
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