High-resolution non-destructive three-dimensional imaging of integrated circuits

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Author
Holler, Mirko
Guizar-Sicairos, Manuel
Tsai, Esther H.R.
Dinapoli, Roberto
Müller, Elisabeth
Bunk, Oliver
Raabe, Jörg
Aeppli, Gabriel
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Date
2017-03
Type
    Journal Article
Publication status
published
External links
Journal / series
Nature
Volume
543(7645)
Pages / Article No.
402
Publisher
Nature
Notes
Published online 15 March 2017.
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Citations
Cited 242 times in Web of Science
Cited 267 times in Scopus
ETH Bibliography
yes
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