RF sputter deposition of waveguiding epitaxial LiNbO₃ and KNbO₃ thin films

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Author
Schwyn Thöny, Silvia Brigitte
Date
1992
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-000668638
Publication status
published
External links
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Contributors
Examiner: Günter, Peter
Examiner: Lehmann, H. W.
Publisher
ETH Zürich
Subject
SPUTTERING MIT ELEKTRONENSTRAHLEN (ELEKTRODYNAMIK); ERZEUGUNG DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); NIOB-KALIUM-VERBINDUNGEN (ANORGANISCHE CHEMIE); LITHIUMMETANIOBAT + LITHIUMNIOBATE (ANORGANISCHE CHEMIE); ELECTRON-BEAM SPUTTERING (ELECTRODYNAMICS); PRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS); NIOBIUM-POTASSIUM COMPOUNDS (INORGANIC CHEMISTRY); LITHIUM METANIOBATE + LITHIUM NIOBATES (INORGANIC CHEMISTRY)
Notes
Diss. Naturwiss. ETH Zürich, Nr. 9929, 1992. Ref.: P. Günter ; Korref.: H. W. Lehmann.
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