Synthesis and characterization of copper and titanium compounds and their application as precursors in chemical vapor deposition

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Author
Plappert, Elisabeth-Charlotte
Date
1995
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-001419996
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Nesper, Reinhard Friedrich
Examiner: Venanzi, Luigi M.
Publisher
ETH Zürich
Subject
KUPFERORGANISCHE VERBINDUNGEN; TITANORGANISCHE VERBINDUNGEN; CHEMISCHE SYNTHESEN + CHEMISCHE REAKTIONEN; ZIRKONIUMORGANISCHE VERBINDUNGEN; EPITAXIALSCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); COPPER-ORGANIC COMPOUNDS; TITANIUM-ORGANIC COMPOUNDS; CHEMICAL SYNTHESIS + CHEMICAL REACTIONS; ZIRCONIUM-ORGANIC COMPOUNDS; THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION (PHYSICS OF MOLECULAR SYSTEMS)
Notes
Diss. Naturwiss. ETH Zürich, Nr. 10996, 1995. Ref.: L. M. Venanzi ; Korref.: R. Nesper ; Korref.: K. H. Dahmen.
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