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dc.contributor.author
Sutter, Peter Werner
dc.contributor.supervisor
Abstreiter, Gerhard
dc.contributor.supervisor
Wachter, Peter
dc.date.accessioned
2017-06-13T02:00:44Z
dc.date.available
2017-06-13T02:00:44Z
dc.date.issued
1996
dc.identifier.uri
http://hdl.handle.net/20.500.11850/142856
dc.identifier.doi
10.3929/ethz-a-001730151
dc.language.iso
en
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
EPITAXIALSCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
dc.subject
HALBLEITERMATERIALIEN (ELEKTROTECHNIK)
dc.subject
HETEROKONTAKT + HETEROSTRUKTUR (KRISTALLOGRAPHIE)
dc.subject
SILICIUM (CHEMISCHE ELEMENTE)
dc.subject
GERMANIUM (CHEMISCHE ELEMENTE)
dc.subject
SILICIUM-GERMANIUM-VERBINDUNGEN (ANORGANISCHE CHEMIE)
dc.subject
SILICIUMKRISTALLE (ANORGANISCHE CHEMIE)
dc.subject
ELEKTRONISCHE TRANSPORTPROZESSE (PHYSIK DER KONDENSIERTEN MATERIE)
dc.subject
SPUTTERING MIT ELEKTRONENSTRAHLEN (ELEKTRODYNAMIK)
dc.subject
THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION (PHYSICS OF MOLECULAR SYSTEMS)
dc.subject
SEMICONDUCTOR MATERIALS (ELECTRICAL ENGINEERING)
dc.subject
HETEROJUNCTION + HETEROSTRUCTURE (CRYSTALLOGRAPHY)
dc.subject
SILICON (CHEMICAL ELEMENTS)
dc.subject
GERMANIUM (CHEMICAL ELEMENTS)
dc.subject
SILICON-GERMANIUM COMPOUNDS (INORGANIC CHEMISTRY)
dc.subject
SILICON CRYSTALS (INORGANIC CHEMISTRY)
dc.subject
ELECTRON TRANSPORT (CONDENSED-MATTER PHYSICS)
dc.subject
ELECTRON-BEAM SPUTTERING (ELECTRODYNAMICS)
dc.title
Magnetron sputter epitaxy of Si-Ge heterostructures
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
126 S.
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.code.ddc
5 - Science::530 - Physics
ethz.notes
Diss. Naturwiss. ETH Zürich, Nr. 11923, 1996. Ref.: P. Wachter ; Korref.: G. Abstreiter ; Korref.: H. von Känel.
ethz.identifier.diss
11923
ethz.identifier.nebis
001730151
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.date.deposited
2017-06-13T02:02:08Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a0a76c7076442
ethz.ecolpid
eth:40506
ethz.eth
yes
ethz.availability
Closed access
ethz.rosetta.installDate
2017-07-19T05:26:22Z
ethz.rosetta.lastUpdated
2018-11-03T21:33:36Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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