Efficient 3D computation of electrostatic fields and forces in microsystems

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Author
Bächtold, Martin
Baltes, Henry
Date
1997
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-001793808
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Baltes, Heinrich P.
Examiner: Korvink, Jan Gerrit
Publisher
Physical Electronics Laboratory
Subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); HÖCHSTINTEGRIERTE SCHALTUNGEN, VLSI (MIKROELEKTRONIK); MIKROELEKTRONIK + INTEGRIERTE SCHALTUNGEN; ELEKTRISCHE FELDER (ELEKTROSTATIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); VERY LARGE SCALE INTEGRATED CIRCUITS, VLSI (MICROELECTRONICS); MICROELECTRONICS + INTEGRATED CIRCUITS; ELECTRIC FIELDS (ELECTROSTATICS)
Notes
Diss. Techn. Wiss. ETH Zürich, Nr. 12165, 1997. Ref.: Henry Baltes ; Korref.: Jan. G. Korvink ; Korref.: Arokia Nathan.
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