Multi-degree-of-freedom micropositioning using stepping principles

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Author
Zesch, Wolfgang
Date
1997
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-001855164
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Schweitzer, Gerhard
Publisher
ETH Zürich
Subject
NANOTECHNOLOGIE; MIKROMECHANIK (MASCHINENBAU); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); STELLANTRIEBE + STELLEINRICHTUNGEN (AUTOMATISCHE REGELUNG); NANOTECHNOLOGY; MICROMACHINE (MECHANICAL ENGINEERING); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); SERVO-DRIVES + ACTUATORS (AUTOMATIC CONTROL)
Notes
Diss. Techn. Wiss. ETH Zürich, Nr. 12318, 1997. Ref.: G. Schweitzer ; Korref.: R. Y. Siegwart.
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