Development and application of a model hierarchy for silicon process simulation

Download
Abstract (PDF, 204.0Kb)
Fulltext (PDF, 8.185Mb)
Thumbnail
Closed access
Author
Höfler, Alexander
Date
1997
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-001856511
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Fichtner, Wolfgang
Publisher
ETH Zürich
Subject
HALBLEITERBAUELEMENTE + ELEKTRONISCHE BAUELEMENTE (ELEKTRONIK); MODELLRECHNUNG/ELEKTROTECHNIK, ELEKTRONIK, NACHRICHTENTECHNIK, MIKROELEKTRONIK; SEMICONDUCTOR COMPONENTS + ELECTRONIC COMPONENTS (ELECTRONICS); MATHEMATICAL MODELING IN ELECTRICAL ENGINEERING, ELECTRONICS, TELECOMMUNICATIONS, MICROELECTRONICS
Notes
Diss. Techn. Wiss. ETH Zürich, Nr. 12330, 1997. Ref.: W. Fichtner ; Korref.: S. Selberherr.
More
Show all metadata
ETH Bibliography
yes
Altmetrics