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dc.contributor.author
Arx, Martin von
dc.contributor.author
Baltes, Henry
dc.contributor.supervisor
Baltes, Heinrich P.
dc.date.accessioned
2017-06-13T02:27:41Z
dc.date.available
2017-06-13T02:27:41Z
dc.date.issued
1998
dc.identifier.isbn
3-89649-365-5
dc.identifier.uri
http://hdl.handle.net/20.500.11850/143875
dc.identifier.doi
10.3929/ethz-a-002004058
dc.format
application/pdf
dc.language.iso
en
dc.publisher
Hartung-Gorre Verlag
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK)
dc.subject
EIGENSCHAFTEN DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
dc.subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
dc.subject
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS)
dc.subject
PROPERTIES OF THIN LAYERS (PHYSICS OF MOLECULAR SYSTEMS)
dc.subject
MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)
dc.title
Thermal properties of CMOS thin films
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
162 S.
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.code.ddc
5 - Science::530 - Physics
ethz.notes
Diss. Naturwiss. ETH Zürich, Nr. 12743, 1998. Ref.: Henry Baltes ; Korref.: Oliver Paul ; Korref.: Pasqualina M. Sarro.
ethz.identifier.diss
12743
ethz.identifier.nebis
002004058
ethz.publication.place
Konstanz
ethz.publication.status
published
ethz.leitzahl
03263 - Baltes, Henry
ethz.date.deposited
2017-06-13T02:28:09Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a1f384ee70334
ethz.ecolpid
eth:22749
ethz.eth
yes
ethz.availability
Closed access
ethz.rosetta.installDate
2017-07-20T16:29:04Z
ethz.rosetta.lastUpdated
2020-02-15T00:05:19Z
ethz.rosetta.versionExported
true
ethz.COinS
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