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dc.contributor.author
Allenbach, Christian Peter
dc.contributor.supervisor
Gauckler, Ludwig J.
dc.contributor.supervisor
Spencer, Nicholas D.
dc.date.accessioned
2017-06-13T02:57:42Z
dc.date.available
2017-06-13T02:57:42Z
dc.date.issued
2000
dc.identifier.uri
http://hdl.handle.net/20.500.11850/144928
dc.identifier.doi
10.3929/ethz-a-004064305
dc.format
application/pdf
dc.language.iso
en
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
CHEMISCH ERZEUGTE DÜNNE SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
dc.subject
CHEMISCHE BESCHICHTUNGEN AUS DER GASPHASE, CVD (PRODUKTIONSTECHNIK)
dc.subject
ZIRKONIUMVERBINDUNGEN (ANORGANISCHE CHEMIE)
dc.subject
SCHMIERUNG, TRIBOLOGIE
dc.subject
CHEMICAL THIN-LAYER FORMATION (PHYSICS OF MOLECULAR SYSTEMS)
dc.subject
CHEMICAL VAPOUR DEPOSITION, CVD (PRODUCTION ENGINEERING)
dc.subject
ZIRCONIUM COMPOUNDS (INORGANIC CHEMISTRY)
dc.subject
LUBRICATION, TRIBOLOGY
dc.title
MOCVD and tribological properties of thin zirconium carbonitride films
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
173 S.
ethz.code.ddc
DDC - DDC::5 - Science::530 - Physics
ethz.notes
Diss., Technische Wissenschaften ETH Zürich, Nr.13832, 2000.
ethz.identifier.diss
13832
ethz.identifier.nebis
004064305
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02646 - Institut für Polymere / Institute of Polymers::03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
ethz.date.deposited
2017-06-13T02:58:08Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a356942585976
ethz.ecolpid
eth:23811
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-26T16:17:02Z
ethz.rosetta.lastUpdated
2023-02-06T13:47:35Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=MOCVD%20and%20tribological%20properties%20of%20thin%20zirconium%20carbonitride%20films&rft.date=2000&rft.au=Allenbach,%20Christian%20Peter&rft.genre=unknown&rft.btitle=MOCVD%20and%20tribological%20properties%20of%20thin%20zirconium%20carbonitride%20films
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